SumMet Method for Silicon in Microelectronic Devices

SUMMET METHOD FOR SILICON IN MICROELECTRONIC DEVICES

Sectioning Precision Saw with blade recommeded for microelectronic devices
Mounting Castable, typically EpoThin 2
Surface Abrasive / Size Load - lbs [N] / Specimen Base Speed [rpm] Relative Rotation Time [min:sec]
CarbiMet 600 [P1200] grit SiC water cooled 3 [13] 100 Rotation Image Until Plane
VerduTex 6 µm MetaDi Supreme Diamond 5 [22] 100 Rotation Image 3:00
VerduTex 3 µm MetaDi Supreme Diamond 5 [22] 100 Rotation Image 3:00
VerduTex 1 µm MetaDi Supreme Diamond 5 [22] 100 Rotation Image 3:00
ChemoMet 0.06 µm MasterMet Colloidal Silica 2 [9] 100 Rotation Image 2:00